M.Tech U -V Fabrication

NANOCHEMISTRY

NANO FABRICATION-1

NANO FABRICATION-2,

Crystal Growth and Wafer Preparation

 

Unit-V   Fabrication:Crystal growth and wafer preparation, Defects, Clean room concept, Wafer cleaning techniques, Oxidation, Diffusion, Epitaxy, Ion implantation, Metallization, Lithography, Etching, Masking sequences and bipolar and MOS device fabrication process flow, Integration of unit process, Process modeling, Topological design rules, Passive device such as registers and capacitors and their non idealities, Fabrication of nanoelectronics structures.